chengli3

Incamake yo gupima uduce duto dukoresheje imashini ipima iyerekwa

Nkibicuruzwa byingenzi birushanwe, chip ifite santimetero ebyiri cyangwa eshatu gusa mubunini, ariko itwikiriwe cyane na miriyoni mirongo yumurongo, buri kimwe gitunganijwe neza.Biragoye kurangiza neza-neza kandi neza-gutahura ingano ya chip hamwe nubuhanga gakondo bwo gupima.Uwitekaimashini ipima icyerekezoishingiye ku buhanga bwo gutunganya amashusho, ishobora kubona byihuse ibipimo bya geometrike yikintu binyuze mu gutunganya amashusho, hanyuma ikabisesengura ikoresheje software, hanyuma ikarangiza gupima.

wafer-560X315

Hamwe niterambere ryihuse ryumuzunguruko, ubugari bwa chip bugenda buba buto kandi buto.Imashini ipima amashusho ya Chengli ikuza inshuro nyinshi binyuze muri sisitemu ya microscopique optique, hanyuma sensor yerekana ishusho yohereza ishusho ya microscopique kuri mudasobwa, hanyuma ishusho iratunganywa.gutunganya no gupima.

Usibye ubunini busanzwe bwingingo yibanze ya chip detection, intego yo gutahura yibanda ku ntera ihagaritse hagati ya pin vertex ya chip na padiri ugurisha.Impera yo hepfo ya pin ntabwo ihurira hamwe, kandi hariho gusohora gusudira, kandi ubwiza bwibicuruzwa byarangiye ntibushobora kwemezwa.Kubwibyo, ibyo dusabwa kugirango tugenzure ibipimo byimashini zipima amashusho birakomeye.

Binyuze muri CCD na lens ya mashini ipima amashusho, ubunini buranga chip burafatwa, kandi amashusho asobanutse neza arafatwa vuba.Mudasobwa ihindura amakuru yerekana amashusho mubunini bwamakuru, ikora isesengura ryamakosa, kandi ipima amakuru yukuri.

Kugirango ibipimo ngenderwaho byibanze bikenewe kubicuruzwa, ibigo byinshi binini bizahitamo abafatanyabikorwa bizewe.Hamwe nimyaka myinshi yuburambe hamwe nibyiza byumutungo, Chengli iha abakiriya imashini zipima icyerekezo cyo gupima, zikaba zifite ibikoresho bya CCDs hamwe ninzira zitumizwa mu mahanga kugirango tumenye ubunini bwa chip.Fata ubugari bwa pin n'uburebure bwumwanya wo hagati, birihuta kandi neza.


Igihe cyo kohereza: Jul-05-2022